PMMA Spin Curves

Below are spin curves for various concentrations of PMMA, courtesy of the UW Nanofabrication Facility. These are for A-series (anisole solvent) PMMA, but since the baking process evaporates the solvent they're effectively identical to the C-series curves.

Caveat: The spin curves in the PMMA Datasheet will give you different numbers. Most of the datasheet values for thicknesses below 1um aren't very accurate, so use the curves below instead.

pmmaspincurve.png

PMMA_Spin_Curves_from_UW_2.png



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