UMWiki's EBPG web
https://wiki.umn.edu/bin/view/EBPG
The EBPG web of TWiki. TWiki is a Web-Based Collaboration Platform for the Corporate World.en-usCopyright 2016 by contributing authorsWiki Administrator [wiki@umn.edu]The contributing authors of UMWikiUMWikiPowered by Foswiki, The Free and Open Source Wiki.EBPG
https://wiki.umn.edu/EBPG
/pub/System/WebTopBarImages/logo_uofm.gifPublishPluginHistory
https://wiki.umn.edu/EBPG/PublishPluginHistory
Last Published Publisher VanessaZuroski Date 16 Feb 2016 09:50 Dir /swadm/etc/wiki/umwiki/pub/publish/ URL https://wiki.umn.edu/pub/publish/ Web EBPG Content ... (last changed by VanessaZuroski)2016-02-16T15:51:07ZvzuroskiWebHome
https://wiki.umn.edu/EBPG/WebHome
Vistec EBPG5000 Wiki Basic Documentation Standard Operating Procedure Quickstart Troubleshooting Aperture Change Walkthrough Software Help ... (last changed by BryanCord)2015-12-02T17:07:46ZbcordPMMASpinCurve
https://wiki.umn.edu/EBPG/PMMASpinCurve
PMMA Spin Curves Below are spin curves for various concentrations of PMMA, courtesy of the UW Nanofabrication Facility. These are for A series (anisole solvent) PMMA ... (last changed by BryanCord)2015-12-02T17:04:11ZbcordSOP
https://wiki.umn.edu/EBPG/SOP
EBPG Standard Operating Procedure General Notes This document is intended as a refresher for people who have already had full training on the system, NOT as ... (last changed by BryanCord)2015-10-06T18:23:59ZbcordChangeAperture
https://wiki.umn.edu/EBPG/ChangeAperture
Changing and Realigning the Aperture The standard 300 #956;m aperture in the EBPG will serve your purposes for 99.999% of writing jobs. In certain situations, however ... (last changed by BryanCord)2015-10-06T18:19:46ZbcordLinuxGuide
https://wiki.umn.edu/EBPG/LinuxGuide
Linux Command Line Guide (EBPG Computer) Basic Syntax Used In This Guide parameter Required parameter (don t enter the brackets) parameter ... (last changed by BryanCord)2015-07-27T20:02:17ZbcordAlignmentMarks
https://wiki.umn.edu/EBPG/AlignmentMarks
Alignment Mark Design FAQ By popular demand, this document is intended to be a quick guide to good practices for designing, fabricating, and using alignment marks ... (last changed by BryanCord)2015-06-29T17:01:04ZbcordCharging
https://wiki.umn.edu/EBPG/Charging
Charge Suppression Guide Large label written on an insulating substrate. Charging has caused the rectangles that make up the numbers to stitch together incorrectly ... (last changed by BryanCord)2015-06-29T16:42:18ZbcordBilayerProcess
https://wiki.umn.edu/EBPG/BilayerProcess
PMMA/PMGI Bilayer E Beam Liftoff Process Reliable, repeatable liftoff processing in a planetary type evaporation system like the ones in the NFC requires the ability ... (last changed by BryanCord)2015-06-25T15:11:25ZbcordColdDevelop
https://wiki.umn.edu/EBPG/ColdDevelop
PMMA/ZEP Cold Development Developing your resist below room temperature is a reliable, relatively easy way to improve the resolution of processes based on PMMA and ... (last changed by BryanCord)2015-05-12T19:00:27ZbcordShortcuts
https://wiki.umn.edu/EBPG/Shortcuts
Command Line Shortcuts Align Syntax align mark definition Description Automates the process of locating, verifying, and writing down the coordinates of ... (last changed by BryanCord)2015-03-27T15:53:55ZbcordHardMaskProcess
https://wiki.umn.edu/EBPG/HardMaskProcess
High Resolution Si Etch Process Using Oxide Hard Mask Developed by Kevin Roberts (rober074 #64;umn.edu) Obligatory Disclaimer Process outlines are just that; they ... (last changed by BryanCord)2015-03-11T18:12:49ZbcordResistHandling
https://wiki.umn.edu/EBPG/ResistHandling
Resist Handling Best Practices Guide Storing and Handling Resist Resist should NEVER, under any circumstances, be pipetted directly from the stock (factory) bottle ... (last changed by BryanCord)2015-02-17T17:00:27ZbcordSoftwareGuide
https://wiki.umn.edu/EBPG/SoftwareGuide
EBPG Software Guide #RealVNC RealVNC Download Windows (32 bit) Windows (64 bit) Linux (32 bit) Linux (64 bit) MacOS Installation (Win/Mac) Run the downloaded file ... (last changed by BryanCord)2015-02-16T22:23:38ZbcordTransparentSubstrates
https://wiki.umn.edu/EBPG/TransparentSubstrates
Writing on Transparent Substrates One of the Vistec's major weaknesses is its problems with writing on transparent substrates, such as fused silica. The reason for ... (last changed by BryanCord)2014-11-11T17:55:32ZbcordDatasheets
https://wiki.umn.edu/EBPG/Datasheets
Datasheets Resists Positive \ PMMA \ PMGI \ ZEP520A Negative \ ma N 2403 \ XR 1541 (HSQ) \ NEB31 \ ... (last changed by BryanCord)2014-11-11T17:53:48Zbcord