UMWiki's EBPG web The EBPG web of TWiki. TWiki is a Web-Based Collaboration Platform for the Corporate World. en-us Copyright 2016 by contributing authors Wiki Administrator [] The contributing authors of UMWiki UMWiki Powered by Foswiki, The Free and Open Source Wiki.EBPG /pub/System/WebTopBarImages/logo_uofm.gif PublishPluginHistory Last Published Publisher VanessaZuroski Date 16 Feb 2016 09:50 Dir /swadm/etc/wiki/umwiki/pub/publish/ URL Web EBPG Content ... (last changed by VanessaZuroski) 2016-02-16T15:51:07Z vzuroski WebHome Vistec EBPG5000 Wiki Basic Documentation Standard Operating Procedure Quickstart Troubleshooting Aperture Change Walkthrough Software Help ... (last changed by BryanCord) 2015-12-02T17:07:46Z bcord PMMASpinCurve PMMA Spin Curves Below are spin curves for various concentrations of PMMA, courtesy of the UW Nanofabrication Facility. These are for A series (anisole solvent) PMMA ... (last changed by BryanCord) 2015-12-02T17:04:11Z bcord SOP EBPG Standard Operating Procedure General Notes This document is intended as a refresher for people who have already had full training on the system, NOT as ... (last changed by BryanCord) 2015-10-06T18:23:59Z bcord ChangeAperture Changing and Realigning the Aperture The standard 300 #956;m aperture in the EBPG will serve your purposes for 99.999% of writing jobs. In certain situations, however ... (last changed by BryanCord) 2015-10-06T18:19:46Z bcord LinuxGuide Linux Command Line Guide (EBPG Computer) Basic Syntax Used In This Guide parameter Required parameter (don t enter the brackets) parameter ... (last changed by BryanCord) 2015-07-27T20:02:17Z bcord AlignmentMarks Alignment Mark Design FAQ By popular demand, this document is intended to be a quick guide to good practices for designing, fabricating, and using alignment marks ... (last changed by BryanCord) 2015-06-29T17:01:04Z bcord Charging Charge Suppression Guide Large label written on an insulating substrate. Charging has caused the rectangles that make up the numbers to stitch together incorrectly ... (last changed by BryanCord) 2015-06-29T16:42:18Z bcord BilayerProcess PMMA/PMGI Bilayer E Beam Liftoff Process Reliable, repeatable liftoff processing in a planetary type evaporation system like the ones in the NFC requires the ability ... (last changed by BryanCord) 2015-06-25T15:11:25Z bcord ColdDevelop PMMA/ZEP Cold Development Developing your resist below room temperature is a reliable, relatively easy way to improve the resolution of processes based on PMMA and ... (last changed by BryanCord) 2015-05-12T19:00:27Z bcord Shortcuts Command Line Shortcuts Align Syntax align mark definition Description Automates the process of locating, verifying, and writing down the coordinates of ... (last changed by BryanCord) 2015-03-27T15:53:55Z bcord HardMaskProcess High Resolution Si Etch Process Using Oxide Hard Mask Developed by Kevin Roberts (rober074 #64; Obligatory Disclaimer Process outlines are just that; they ... (last changed by BryanCord) 2015-03-11T18:12:49Z bcord ResistHandling Resist Handling Best Practices Guide Storing and Handling Resist Resist should NEVER, under any circumstances, be pipetted directly from the stock (factory) bottle ... (last changed by BryanCord) 2015-02-17T17:00:27Z bcord SoftwareGuide EBPG Software Guide #RealVNC RealVNC Download Windows (32 bit) Windows (64 bit) Linux (32 bit) Linux (64 bit) MacOS Installation (Win/Mac) Run the downloaded file ... (last changed by BryanCord) 2015-02-16T22:23:38Z bcord TransparentSubstrates Writing on Transparent Substrates One of the Vistec's major weaknesses is its problems with writing on transparent substrates, such as fused silica. The reason for ... (last changed by BryanCord) 2014-11-11T17:55:32Z bcord Datasheets Datasheets Resists Positive \ PMMA \ PMGI \ ZEP520A Negative \ ma N 2403 \ XR 1541 (HSQ) \ NEB31 \ ... (last changed by BryanCord) 2014-11-11T17:53:48Z bcord