Vistec EBPG5000+ Wiki

This is an archive of the Vistec EBPG5000+ wiki.

For Vistec training or questions please contact Kevin Roberts (rober074@umn.edu).

New Software

As of September 16, 2016, new Vistec users should not use the software provided in this Wiki archive. Instead, please follow this procedure.

1. Download the EBPG Cygwin Tools.
2. Unzip EBPG-Cygwin.zip.
3. Open the extracted folder and follow the instructions in README.html.

If you are an existing Vistec user, you are welcome to use the new software too. Advantages include:

• Increased performance.
• Increased security.
• Easier to use.
• No more VNC errors.

Basic Documentation

• Standard Operating Procedure
• Quickstart
• Troubleshooting
• Aperture Change Walkthrough

Software Help

• Software Guide/Downloads
• Software Training Presentation
• LayoutBEAMER Tutorial (Yale)
• LayoutBEAMER Training Videos
• Linux Command Line Guide
• Useful Command Shortcuts
• CJob Quickstart

Process Notes

• Alignment Mark FAQ
• Resist Handling Guide
• PMMA Spin Curves (from UW)
• Charge Suppression Guide
• Transparent Substrates Guide
• Spot Size Guide
• Shot Noise Guide
• Beam Drift Guide (Yale)
• Image-Based Alignment Tutorial

Application Notes

• PMMA/ZEP Cold DevelopmentProcess
• PMMA/PMGI Bilayer Liftoff Process
• High-Resolution Si Etch Process

Miscellaneous Information

• EBL Resist Quick Reference Chart
• Chemical Datasheets

Other Online Resources

• Yale EBPG Documentation
• University of Washington EBL Home

The EBPG is administered by Kevin Roberts (rober074@umn.edu). Contact him if you need training or have questions.

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