cjobin a terminal window or picking CJob from the main desktop menu. On the EBPG computer, it can be run either from a terminal (the
cjobcommand again) or the desktop icon.
ce <username>is used to do this.
|The main window with a simple job flow defined. Here a Substrate object called SUBSTRATE is connected to an Exposure object called exp1_piece, which is connected to a Pattern object containing a GPF file called stit500_15nm625HR.gpf. The substrate, with the pattern in the center of it, is displayed in the lower window.|
/jobssubfolder of your home directory. CJob gives exports filenames of the type
substratename_exposurename.jobby default, but this can be changed to whatever you want.
|The Layout dialog box. The red arrow indicates the section where exposure arrays can be set up, the blue arrow indicates the Dose Update setting that allows the dose to be varied between array elements, and the green arrow indicates where Layout-level alignment marks can be added.|
|Close-up of the expanded Repetition settings in the Layout dialog box. In this case, a 5x5 2D repetition of a pattern that is 500x500 μm wide is set up, with 100 μm of space between adjacent patterns in both the X and Y directions.|
|The Dose Update dialog. Here the user has set the dose to increase by 10 μC/cm2 for each successive array element.|
|The Pattern dialog box. The options here allow you to select the pattern file, the exposure dose, the beam current, and an optional beam-defocus width, as well as an offset position if desired.|
/jobsdirectory on the EBPG computer by default.
|The Shape object dialog box. The options here let you choose a rectangle, border, or cross of a given size to expose at set exposure conditions.|
|The Identifier object dialog, which allows you to add text labels and other useful things to a job.|
|The dialog for setting up alignment marks at the Exposure level (the Layout, Shape, Pattern, and Identifier alignment dialogs are essentially identical).|
pg marker create <name> <type> <tone> <x1,y1> [x2,y2], where
nameis the name you want to give the mark (6 characters or less),
typeis the type of mark (“rect” for rectangle, “cross” for cross),
toneis the contrast of the mark (“pos” for positive, “neg” for negative) and the xy coordinates are the dimensions of your mark in microns.
pg ebpg save, then restart CJOB. This will save the system conditions, including mark definitions, to the global data file that CJOB reads when it starts up.
pg move marker <markname> <x,y> [--rel], where
marknameis the name of the mark definition the system should look for and
<x,y>is the coordinates of the mark, in absolute stage coordinates (unless the
--relflag is added, in which case
<x,y>is a vector from the current stage position). Units are in microns unless specified in millimeters (e.g. 50.2mm,30.8mm).