| Problem |
27 Nov |
K2C Gold Target AJA |
new target ordered -> A new target has been ordered, will update when we have an eta. right now eta is 2-3 weeks from today.
|
olms0025 |
| Problem |
18 Dec |
P4 Aligner Suss MA6 |
Loss of Vacuum error when loading 4 in wafers -> After loading wafer into MA6 a loss of wafer vacuum error appears. If you confirm with enter the tool will find WEC properly and will expose. This will probably be an issue for other wafer sizes as well.
|
jorex023 |
| Problem |
18 Dec |
K3 Sputterer AJA1 |
waiting for power supply parts -> Power supply is at vendor and we are still waiting for parts before it can be repaired and shipped back. will update when we have more information.
|
olms0025 |
| Problem |
6 Feb |
P4 Wet Bench Develop |
Light burnt out -> The light is burnt out on the left side of the bench.
|
parme033 |
| Problem |
3 Mar |
P2 Etcher Ion Mill Intlvac |
Waiting for new Cryo -> Cryo Temps on this tool are higher then normal but vacuum still looks great. Cryo temperature interlock setpoints changed from 15K and 18K to 28K and 35K while a new cryo is being sourced.
|
mikke168 |
| Problem |
3 Mar |
P5 AFM DI5000 |
Needs new tip before use -> I used my own tip and a new tip will need to be installed before using again. Tip fixter is in the black cylinder
|
matthew.robbins |
| Problem |
12 Mar |
P4 Wet Bench Develop |
Wetbench -> This wetbench has a CDA leak affecting water usage, the QDR is still funtional.
|
mmargosi |
| Problem |
12 Mar |
P3 Wet Bench HF Process |
Wetbench -> The QDR is down due to sofware issues. The rest of bench is funtional.
|
mmargosi |
| Problem |
12 Mar |
PAN 185 Gas Sorption Analyzer |
Parts ordering -> Replacement valves are on order, and have not arrived yet. I will call for eta if not deliverd by friday 14th.
|
mmargosi |
| Problem |
6 Dec |
K1 Oxidation Tube 14 Gate Oxide Tylan |
tycom central control console reliability pm -> doing biannual pm on Tycom CCC by disassembling and checking power supply voltages and cleaning PC board edge connections with contact cleaner as a reliability pm
|
broug001 |
| Problem |
28 Nov |
KA2 CVIV testing |
IV - Computer issues -> A replacement computer is being worked on. The CV and IV HP
systems can be used in manual mode. Without computer no data files
can be saved.
|
whipp003 |
| Problem |
14 Mar |
K1 ALD Savannah Ultratech |
Current Films update -> Precursors were rearragnged Al2O3, HfO2 and SnO are now available. Do not use SiO2.
|
jorex023 |
| Shutdown |
23 Apr |
P1 Ellipsometer Rudolph |
shutdown update -> "System was making random crackling sounds and found the laser was not on. Turned system power off using key on the side." This is still in queue, will probably not get to this for several weeks. If you need the tool urgently, contact Brian Olmsted
|
olms0025 |
| Shutdown |
16 Aug |
KA1 Si Nanowire Deposition |
exhaust off |
cibuzar |
| Shutdown |
4 Feb |
K1 Oxidation Tube 15 General Tylan |
Process person wants to do some content analysis test runs in the near future -> due to T15 having been used for special project use since 2020.
|
broug001 |
| Shutdown |
18 Feb |
K3 Evaporator Temescal |
extreme focus to get this equipment up -> to start with verifying all facilities to all items and check each for functionality before checkiing gate valve, pumps, hearth, shutter operation; chamber looks good.
|
broug001 |
| Shutdown |
5 Mar |
P3 HD PCVD Plasmatherm |
Pump install and system reassembly resuming -> Work on this tool is slowly resuming as the UHV gets closer to completing it's bakeout. New pump is being installed, cleaning and reassembly of chamber components resumes.
|
mikke168 |
| Shutdown |
3 Oct |
K1 Oxidation Tube 14 Gate Oxide Tylan |
serioal io error and ot TC error and torch controller needs to heat -> no steam oxidations until torch temp exceeds 650C to satisfy H2 temp interlock
|
broug001 |
| Shutdown |
27 Nov |
K1 Ellipsometer Spectroscopic Woolam |
working through power supply issues -> replacement power supply not compatible with tool needs. Ordering new power supply.
|
olms0025 |
| Shutdown |
11 Mar |
K1 Wafer Bonder SB6 Karl Suss |
TOOL or pin Could not be moved down -> Needing this error resolved - checking of the parts and sensors to find the paroblem.
|
whipp003 |
| Shutdown |
12 Mar |
P5 Ebeam Spinner CEE2 |
Parts ordering -> Parts are orderd and on 6 to 8 wk back order.
|
mmargosi |
| Shutdown |
12 Mar |
K3 Evaporator Varian |
High Vacuum -> Removed and rebuilt accute vacuum leak. Vacuum is still high, I will service the cryo compressor next.
|
mmargosi |
| Shutdown |
12 Mar |
P1 UHV Deposition AJA |
chamber baking continues after system full cleaning and upgrades -> getting closer toward guaranteed base pressure of 2x10-9T
|
broug001 |
| Shutdown |
12 Mar |
K3 Sputterer AJA1 |
field service repair update -> BW Systems is reprogramming the PLCs and boards for the HMI. They are doing this offsite and the effort is in process.
|
olms0025 |
| Shutdown |
12 Mar |
P5 Ebeam Litho EBPG5000+ Vistec |
Possible Alignment Issue -> A user reported an error which is usually the result of a poorly aligned beam. I wil check beam alignment early in the day tomorrow, and if I can't resolve it, I will get Raith to take a look.
|
rober074 |