crankto start your desktop. Leave the SSH window open; closing it will kill your desktop. Now log into your VNC desktop by connecting your VNC client to
XXis the unique desktop ID you received when your account was created. If you don’t remember it, typing
showvncin the SSH window will display your desktop ID. Once logged into VNC, start LayoutBEAMER? using the desktop menu (right-click to bring it up) or by typing
lbat any terminal prompt. Only one person can be using Beamer at any given time, so if someone’s on it the software will ask you to wait or call them to see if they’re done. Otherwise, the first time you use it the system will prompt you for your name and phone number so other people can do the same when you’re on it. Please be considerate and enter your correct name/number. If you need to re-enter your contact info for any reason, simply edit or delete the
beamer_contactfile in your home directory. LayoutBEAMER? can do a lot of things, but in this simplest case we’re only going to consider two of them First, drag the “Import” box on the left into the work area at the right and select the GDS/CIF file you want to import (the one you uploaded in the last step) and which layer(s) of it you want to use. Next, Drag the “Export” box over the bottom of the Import box you already added until the mouse cursor changes and a black dot appears under the Import box. In the first dialog that pops up when you drop the Export module, choose the output name and path. By default, output files have the .gpf extension (EBPG-readable patterns) and go in the /patterns subdirectory of your home directory Once you pick the filename, a box full of options will appear. Choose “UMN EBPG5000+ 20bit 50MHz 100kV” as the Format Type (this should be selected by default). The Writing Grid contains the Resolution and Beam Step Size parameters. Resolution is the grid-snap resolution used to fracture your pattern, and should generally be set to 0.5 or 1 nm. Beam Step Size is the diameter of the pixels your shapes will be fractured into and can be any integer multiple of the Resolution. In general, it’s a good idea to use a step size smaller than your smallest feature; 10 nm is the default, but it can be set as low as 0.5 nm. The “Advanced” and “Tool” settings aren’t typically things you need to mess with. In the “Extent” tab, you can choose how wide the pattern area is (it defaults to the minimum possible size). This can be useful if you have two different-sized patterns that you want to overlap; you can give them both the same extent as the larger one. Once everything is set the way you want, hit OK to save your GPF file.
|Block diagram of the basic workflow used to expose a pattern on the EBPG, including which steps occur on which computer.|